Stamp deformation and its influence on residual layer homogeneity in Thermal Nanoimprint Lithography

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Publication Details

Output type: Journal article

UM6P affiliated Publication?: No

Author list: S. Merino, A. Retolaza, H. Schift, V. Trabadelo

Publisher: Elsevier

Publication year: 2008

Journal: Microelectronic Engineering (0167-9317)

Volume number: 85

Issue number: 5-6

Start page: 877

End page: 880

Number of pages: 4

ISSN: 0167-9317

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Last updated on 2021-15-06 at 23:16